Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings.
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| Title: | Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings. |
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| Authors: | Kaziev, Andrey V.1, Tumarkin, Alexander V.1,2, Kolodko, Dobrynya V.1,2, Kharkov, Maksim M.1,2, Konaguru, Raghavendra1, Ageychenkov, Dmitry G.1, Samotaev, Nikolay N.1, nnsamotaev@mephi.ru, Oblov, Konstantin Yu.1 |
| Source: | Applied Sciences (2076-3417); Apr2025, Vol. 15 Issue 8, p4305, 15p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20763417 |
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| DOI: | 10.3390/app15084305 |
