View in EDS HTML Full Text PDF Full Text

Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings.

Saved in:
Bibliographic Details
Title: Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings.
Authors: Kaziev, Andrey V.1, Tumarkin, Alexander V.1,2, Kolodko, Dobrynya V.1,2, Kharkov, Maksim M.1,2, Konaguru, Raghavendra1, Ageychenkov, Dmitry G.1, Samotaev, Nikolay N.1, nnsamotaev@mephi.ru, Oblov, Konstantin Yu.1
Source: Applied Sciences (2076-3417); Apr2025, Vol. 15 Issue 8, p4305, 15p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 184792427
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Kaziev%2C+Andrey+V%2E%22">Kaziev, Andrey V.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Tumarkin%2C+Alexander+V%2E%22">Tumarkin, Alexander V.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Kolodko%2C+Dobrynya+V%2E%22">Kolodko, Dobrynya V.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Kharkov%2C+Maksim+M%2E%22">Kharkov, Maksim M.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Konaguru%2C+Raghavendra%22">Konaguru, Raghavendra</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Ageychenkov%2C+Dmitry+G%2E%22">Ageychenkov, Dmitry G.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Samotaev%2C+Nikolay+N%2E%22">Samotaev, Nikolay N.</searchLink><relatesTo>1</relatesTo>, <i>nnsamotaev@mephi.ru</i><br /><searchLink fieldCode="AU" term="%22Oblov%2C+Konstantin+Yu%2E%22">Oblov, Konstantin Yu.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Applied+Sciences+%282076-3417%29%22">Applied Sciences (2076-3417)</searchLink>; Apr2025, Vol. 15 Issue 8, p4305, 15p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=184792427
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.3390/app15084305
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 15
        StartPage: 4305
    Titles:
      – TitleFull: Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Kaziev, Andrey V.
      – PersonEntity:
          Name:
            NameFull: Tumarkin, Alexander V.
      – PersonEntity:
          Name:
            NameFull: Kolodko, Dobrynya V.
      – PersonEntity:
          Name:
            NameFull: Kharkov, Maksim M.
      – PersonEntity:
          Name:
            NameFull: Konaguru, Raghavendra
      – PersonEntity:
          Name:
            NameFull: Ageychenkov, Dmitry G.
      – PersonEntity:
          Name:
            NameFull: Samotaev, Nikolay N.
      – PersonEntity:
          Name:
            NameFull: Oblov, Konstantin Yu.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 04
              Text: Apr2025
              Type: published
              Y: 2025
          Identifiers:
            – Type: issn-print
              Value: 20763417
          Numbering:
            – Type: volume
              Value: 15
            – Type: issue
              Value: 8
          Titles:
            – TitleFull: Applied Sciences (2076-3417)
              Type: main
ResultId 1