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Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy.

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Bibliographic Details
Title: Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy.
Authors: Kaspar, Tiffany C.1, tiffany.kaspar@pnnl.gov, Akers, Sarah2, sarah.akers@pnnl.gov, Sprueill, Henry W.2, Ter-Petrosyan, Arman H.2, Bilbrey, Jenna A.2, Hopkins, Derek3, Harilal, Ajay2, Christudasjustus, Jijo1, Gemperline, Patrick4, Comes, Ryan B.5
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; May2025, Vol. 43 Issue 3, p1-15, 15p
Database: Applied Science & Technology Source
Description
ISSN:07342101
DOI:10.1116/6.0004493