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Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy.

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Title: Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy.
Authors: Kaspar, Tiffany C.1, tiffany.kaspar@pnnl.gov, Akers, Sarah2, sarah.akers@pnnl.gov, Sprueill, Henry W.2, Ter-Petrosyan, Arman H.2, Bilbrey, Jenna A.2, Hopkins, Derek3, Harilal, Ajay2, Christudasjustus, Jijo1, Gemperline, Patrick4, Comes, Ryan B.5
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; May2025, Vol. 43 Issue 3, p1-15, 15p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 185107603
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=185107603
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        Value: 10.1116/6.0004493
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      – Code: eng
        Text: English
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      – TitleFull: Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy.
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            – D: 01
              M: 05
              Text: May2025
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              Y: 2025
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              Value: 43
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