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Effective surface passivation on n-type crystalline silicon of AlOx thin films by thermal atomic layer deposition.

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Bibliographic Details
Title: Effective surface passivation on n-type crystalline silicon of AlOx thin films by thermal atomic layer deposition.
Authors: Qu, Shiyu1,2, Jia, Xiaojie1,2, Wen, Lilan1,2, Li, Xiaotong1,2, Su, Ju1,2, Zhang, Xianyang1,2, Diao, Hongwei1, Zhou, Chunlan1,2, Zhao, Lei1,2, zhaolei@mail.iee.ac.cn, Wang, Wenjing2,3
Source: Journal of Materials Science: Materials in Electronics; Jun2025, Vol. 36 Issue 16, p1-12, 12p
Database: Applied Science & Technology Source
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ISSN:09574522
DOI:10.1007/s10854-025-14972-z