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Effective surface passivation on n-type crystalline silicon of AlOx thin films by thermal atomic layer deposition.

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Title: Effective surface passivation on n-type crystalline silicon of AlOx thin films by thermal atomic layer deposition.
Authors: Qu, Shiyu1,2, Jia, Xiaojie1,2, Wen, Lilan1,2, Li, Xiaotong1,2, Su, Ju1,2, Zhang, Xianyang1,2, Diao, Hongwei1, Zhou, Chunlan1,2, Zhao, Lei1,2, zhaolei@mail.iee.ac.cn, Wang, Wenjing2,3
Source: Journal of Materials Science: Materials in Electronics; Jun2025, Vol. 36 Issue 16, p1-12, 12p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 185803304
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Effective surface passivation on n-type crystalline silicon of AlOx thin films by thermal atomic layer deposition.
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  Data: <searchLink fieldCode="AU" term="%22Qu%2C+Shiyu%22">Qu, Shiyu</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Jia%2C+Xiaojie%22">Jia, Xiaojie</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Wen%2C+Lilan%22">Wen, Lilan</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Xiaotong%22">Li, Xiaotong</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Su%2C+Ju%22">Su, Ju</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Xianyang%22">Zhang, Xianyang</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Diao%2C+Hongwei%22">Diao, Hongwei</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhou%2C+Chunlan%22">Zhou, Chunlan</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhao%2C+Lei%22">Zhao, Lei</searchLink><relatesTo>1,2</relatesTo>, <i>zhaolei@mail.iee.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Wang%2C+Wenjing%22">Wang, Wenjing</searchLink><relatesTo>2,3</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Jun2025, Vol. 36 Issue 16, p1-12, 12p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=185803304
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        Value: 10.1007/s10854-025-14972-z
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        Text: English
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        PageCount: 12
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            – D: 01
              M: 06
              Text: Jun2025
              Type: published
              Y: 2025
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              Value: 36
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            – TitleFull: Journal of Materials Science: Materials in Electronics
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