Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy.
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| Title: | Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy. |
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| Authors: | Hong, Hao1,2, Lei, Xin3, Wei, Jiangtao2, Tang, Wenjun4, Ye, Minjie2, Sun, Jianwen2, Zhang, Guoqi1, g.q.zhang@tudelft.nl, Sarro, Pasqualina M.1, p.m.sarro@tudelft.nl, Liu, Zewen2, liuzw@tsinghua.edu.cn |
| Source: | Microsystems & Nanoengineering; 6/23/2025, Vol. 11 Issue 1, p1-10, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 20961030 |
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| DOI: | 10.1038/s41378-025-00973-9 |
