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Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy.

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Title: Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy.
Authors: Hong, Hao1,2, Lei, Xin3, Wei, Jiangtao2, Tang, Wenjun4, Ye, Minjie2, Sun, Jianwen2, Zhang, Guoqi1, g.q.zhang@tudelft.nl, Sarro, Pasqualina M.1, p.m.sarro@tudelft.nl, Liu, Zewen2, liuzw@tsinghua.edu.cn
Source: Microsystems & Nanoengineering; 6/23/2025, Vol. 11 Issue 1, p1-10, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186106763
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy.
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  Data: <searchLink fieldCode="AU" term="%22Hong%2C+Hao%22">Hong, Hao</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Lei%2C+Xin%22">Lei, Xin</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Wei%2C+Jiangtao%22">Wei, Jiangtao</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Tang%2C+Wenjun%22">Tang, Wenjun</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Ye%2C+Minjie%22">Ye, Minjie</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Sun%2C+Jianwen%22">Sun, Jianwen</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Guoqi%22">Zhang, Guoqi</searchLink><relatesTo>1</relatesTo>, <i>g.q.zhang@tudelft.nl</i><br /><searchLink fieldCode="AU" term="%22Sarro%2C+Pasqualina+M%2E%22">Sarro, Pasqualina M.</searchLink><relatesTo>1</relatesTo>, <i>p.m.sarro@tudelft.nl</i><br /><searchLink fieldCode="AU" term="%22Liu%2C+Zewen%22">Liu, Zewen</searchLink><relatesTo>2</relatesTo>, <i>liuzw@tsinghua.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Microsystems+%26+Nanoengineering%22">Microsystems & Nanoengineering</searchLink>; 6/23/2025, Vol. 11 Issue 1, p1-10, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186106763
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        Value: 10.1038/s41378-025-00973-9
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      – Code: eng
        Text: English
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              M: 06
              Text: 6/23/2025
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              Y: 2025
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