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Structural and spectroscopic properties of nitrogen ion-implanted GaN epitaxial layers.

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Bibliographic Details
Title:	Structural and spectroscopic properties of nitrogen ion-implanted GaN epitaxial layers.
Authors:	Sharmila^1,2, Pandey, Akhilesh¹, akhilesh.physics@gmail.com, Singh, Nanhey¹, Dalal, Sandeep¹, Gupta, Govind³, Kumar, Pandian Senthil²
Source:	Journal of Materials Science: Materials in Electronics; Jun2025, Vol. 36 Issue 16, p1-15, 15p
Database:	Applied Science & Technology Source
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Description
ISSN:	09574522
DOI:	10.1007/s10854-025-14945-2