Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling.
Saved in:
| Title: | Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling. |
|---|---|
| Authors: | Atlas, Sharona1,2, Har Lavan, Shani1, Kaplan, Amir2, Lehrer, Avi1, Rozenberg, Illya1, Zhao, Hao3, Baraban, Joshua H.1, jbaraban@bgu.ac.il |
| Source: | Plasma Chemistry & Plasma Processing; Jul2025, Vol. 45 Issue 4, p1261-1292, 32p |
| Database: | Applied Science & Technology Source |
|
Full text is not displayed to guests.
Login for full access.
|
|
| ISSN: | 02724324 |
|---|---|
| DOI: | 10.1007/s11090-025-10563-2 |
