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Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling.

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Title: Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling.
Authors: Atlas, Sharona1,2, Har Lavan, Shani1, Kaplan, Amir2, Lehrer, Avi1, Rozenberg, Illya1, Zhao, Hao3, Baraban, Joshua H.1, jbaraban@bgu.ac.il
Source: Plasma Chemistry & Plasma Processing; Jul2025, Vol. 45 Issue 4, p1261-1292, 32p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186156790
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Atlas%2C+Sharona%22">Atlas, Sharona</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Har+Lavan%2C+Shani%22">Har Lavan, Shani</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Kaplan%2C+Amir%22">Kaplan, Amir</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Lehrer%2C+Avi%22">Lehrer, Avi</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Rozenberg%2C+Illya%22">Rozenberg, Illya</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhao%2C+Hao%22">Zhao, Hao</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Baraban%2C+Joshua+H%2E%22">Baraban, Joshua H.</searchLink><relatesTo>1</relatesTo>, <i>jbaraban@bgu.ac.il</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Plasma+Chemistry+%26+Plasma+Processing%22">Plasma Chemistry & Plasma Processing</searchLink>; Jul2025, Vol. 45 Issue 4, p1261-1292, 32p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186156790
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s11090-025-10563-2
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 32
        StartPage: 1261
    Titles:
      – TitleFull: Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Atlas, Sharona
      – PersonEntity:
          Name:
            NameFull: Har Lavan, Shani
      – PersonEntity:
          Name:
            NameFull: Kaplan, Amir
      – PersonEntity:
          Name:
            NameFull: Lehrer, Avi
      – PersonEntity:
          Name:
            NameFull: Rozenberg, Illya
      – PersonEntity:
          Name:
            NameFull: Zhao, Hao
      – PersonEntity:
          Name:
            NameFull: Baraban, Joshua H.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: Jul2025
              Type: published
              Y: 2025
          Identifiers:
            – Type: issn-print
              Value: 02724324
          Numbering:
            – Type: volume
              Value: 45
            – Type: issue
              Value: 4
          Titles:
            – TitleFull: Plasma Chemistry & Plasma Processing
              Type: main
ResultId 1