Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.
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| Title: | Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms. |
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| Authors: | Pan, Jingyu1,2, Zhang, Dongsheng1,2, wjg@siom.ac.cn, Liu, Shijie1,2, jdshao@siom.ac.cn, Wang, Jianguo2, Shao, Jianda2 |
| Source: | Coatings (2079-6412); Jun2025, Vol. 15 Issue 6, p700, 20p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings15060700 |
