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Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.

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Title: Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.
Authors: Pan, Jingyu1,2, Zhang, Dongsheng1,2, wjg@siom.ac.cn, Liu, Shijie1,2, jdshao@siom.ac.cn, Wang, Jianguo2, Shao, Jianda2
Source: Coatings (2079-6412); Jun2025, Vol. 15 Issue 6, p700, 20p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186205110
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PubType: Academic Journal
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  Data: Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.
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  Data: <searchLink fieldCode="JN" term="%22Coatings+%282079-6412%29%22">Coatings (2079-6412)</searchLink>; Jun2025, Vol. 15 Issue 6, p700, 20p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186205110
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        Value: 10.3390/coatings15060700
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      – Code: eng
        Text: English
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        StartPage: 700
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      – TitleFull: Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms.
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              M: 06
              Text: Jun2025
              Type: published
              Y: 2025
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