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Application of Two-Element Zn-Al Metallic Target for Deposition of Aluminum-Doped Zinc Oxide—Analysis of Sputtering Process and Properties of Obtained Transparent Conducting Films.

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Title: Application of Two-Element Zn-Al Metallic Target for Deposition of Aluminum-Doped Zinc Oxide—Analysis of Sputtering Process and Properties of Obtained Transparent Conducting Films.
Authors: Kiełczawa, Szymon1, szymon.kielczawa@pwr.edu.pl, Wiatrowski, Artur1, Mazur, Michał1, Posadowski, Witold1, Domaradzki, Jarosław1
Source: Coatings (2079-6412); Jun2025, Vol. 15 Issue 6, p713, 19p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings15060713