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Application of Two-Element Zn-Al Metallic Target for Deposition of Aluminum-Doped Zinc Oxide—Analysis of Sputtering Process and Properties of Obtained Transparent Conducting Films.

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Title: Application of Two-Element Zn-Al Metallic Target for Deposition of Aluminum-Doped Zinc Oxide—Analysis of Sputtering Process and Properties of Obtained Transparent Conducting Films.
Authors: Kiełczawa, Szymon1, szymon.kielczawa@pwr.edu.pl, Wiatrowski, Artur1, Mazur, Michał1, Posadowski, Witold1, Domaradzki, Jarosław1
Source: Coatings (2079-6412); Jun2025, Vol. 15 Issue 6, p713, 19p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186205123
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        Value: 10.3390/coatings15060713
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      – Code: eng
        Text: English
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        PageCount: 19
        StartPage: 713
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      – TitleFull: Application of Two-Element Zn-Al Metallic Target for Deposition of Aluminum-Doped Zinc Oxide—Analysis of Sputtering Process and Properties of Obtained Transparent Conducting Films.
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            NameFull: Wiatrowski, Artur
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              M: 06
              Text: Jun2025
              Type: published
              Y: 2025
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              Value: 15
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