Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance.
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| Title: | Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance. |
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| Authors: | Mollard, Laurent1, laurent.mollard@cea.fr, Dieppedale, Christel1, Hamelin, Antoine1, Liechti, Romain1, Le Rhun, Gwenael1 |
| Source: | Journal of Sensors & Sensor Systems; 2025, Vol. 14 Issue 1, p27-35, 9p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 21948771 |
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| DOI: | 10.5194/jsss-14-27-2025 |
