Plasma dynamics of modulated pulsed power magnetron sputtered Cr target in an Ar-He atmosphere.
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| Title: | Plasma dynamics of modulated pulsed power magnetron sputtered Cr target in an Ar-He atmosphere. |
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| Authors: | Li, Y. G.1, ygli@dlut.edu.cn, Ouyang, G. Z.1, Cui, L.1, Zhou, Z. Y.1 |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2025, Vol. 43 Issue 4, p1-9, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/6.0004623 |
