Analysis of x-ray emission spectroscopy (XES) data using artificial intelligence techniques included in the XES Neo package.
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| Title: | Analysis of x-ray emission spectroscopy (XES) data using artificial intelligence techniques included in the XES Neo package. |
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| Authors: | Humiston, Alaina1,2, Lau, Miu Lun3, Stack, Tim1, Restuccia, Evan1, Herrera-Gomez, Alberto4, Long, Min3, Olive, Daniel T.2, Terry, Jeff1,5, terryj@iit.edu |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2025, Vol. 43 Issue 4, p1-10, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/6.0004326 |
