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Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents.

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Bibliographic Details
Title:	Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents.
Authors:	Kim, Won¹, Lee, Kiseok^1,2, Kim, Hyosik¹, Choi, Mingi², Hong, Suk-Koo², Lee, Ji Eun¹
Source:	Applied Sciences (2076-3417); Jul2025, Vol. 15 Issue 13, p7185, 15p
Database:	Applied Science & Technology Source
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Description
ISSN:	20763417
DOI:	10.3390/app15137185