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Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents.

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Title: Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents.
Authors: Kim, Won1, Lee, Kiseok1,2, Kim, Hyosik1, Choi, Mingi2, Hong, Suk-Koo2, Lee, Ji Eun1
Source: Applied Sciences (2076-3417); Jul2025, Vol. 15 Issue 13, p7185, 15p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186595743
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PubType: Academic Journal
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  Data: <searchLink fieldCode="JN" term="%22Applied+Sciences+%282076-3417%29%22">Applied Sciences (2076-3417)</searchLink>; Jul2025, Vol. 15 Issue 13, p7185, 15p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186595743
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      – Type: doi
        Value: 10.3390/app15137185
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      – Code: eng
        Text: English
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        PageCount: 15
        StartPage: 7185
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      – TitleFull: Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents.
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            NameFull: Kim, Won
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            NameFull: Lee, Kiseok
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            NameFull: Kim, Hyosik
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            NameFull: Choi, Mingi
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            NameFull: Hong, Suk-Koo
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            NameFull: Lee, Ji Eun
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            – D: 01
              M: 07
              Text: Jul2025
              Type: published
              Y: 2025
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