Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents.
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| Title: | Removal of Metal Ions in Spin-on Hardmask Using Functionalized Porous Silica Adsorbents. |
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| Authors: | Kim, Won1, Lee, Kiseok1,2, Kim, Hyosik1, Choi, Mingi2, Hong, Suk-Koo2, Lee, Ji Eun1 |
| Source: | Applied Sciences (2076-3417); Jul2025, Vol. 15 Issue 13, p7185, 15p |
| Database: | Applied Science & Technology Source |
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