Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges.
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| Title: | Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges. |
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| Authors: | Li, Hongmei1,2, Wang, Hongwei1, Li, Yuxin1, Lu, Xiwen1, Li, Lin1, Yan, Yinzhou2, Guo, Wei1, guowei123@nimte.ac.cn |
| Source: | Discover Nano; 7/16/2025, Vol. 20 Issue 1, p1-27, 27p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 27319229 |
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| DOI: | 10.1186/s11671-025-04309-4 |
