P‐7.24: Strategies to develop highly reactive red photoresists via modulation of the exposure and developing processes.
Saved in:
| Title: | P‐7.24: Strategies to develop highly reactive red photoresists via modulation of the exposure and developing processes. |
|---|---|
| Authors: | Li, Ji1,2,3, Fang, Hao3, Zhang, Xia3, Liu, Xiao3, Meng, Hong1,2 |
| Source: | SID Symposium Digest of Technical Papers; Jun2025 Supplement 1, Vol. 56, p1260-1265, 6p |
| Database: | Applied Science & Technology Source |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
|---|---|
| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 186836046 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
| IllustrationInfo | |
| Items | – Name: Title Label: Title Group: Ti Data: P‐7.24: Strategies to develop highly reactive red photoresists via modulation of the exposure and developing processes. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Li%2C+Ji%22">Li, Ji</searchLink><relatesTo>1,2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Fang%2C+Hao%22">Fang, Hao</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Xia%22">Zhang, Xia</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Xiao%22">Liu, Xiao</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Meng%2C+Hong%22">Meng, Hong</searchLink><relatesTo>1,2</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22SID+Symposium+Digest+of+Technical+Papers%22">SID Symposium Digest of Technical Papers</searchLink>; Jun2025 Supplement 1, Vol. 56, p1260-1265, 6p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186836046 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1002/sdtp.19057 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 1260 Titles: – TitleFull: P‐7.24: Strategies to develop highly reactive red photoresists via modulation of the exposure and developing processes. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Li, Ji – PersonEntity: Name: NameFull: Fang, Hao – PersonEntity: Name: NameFull: Zhang, Xia – PersonEntity: Name: NameFull: Liu, Xiao – PersonEntity: Name: NameFull: Meng, Hong IsPartOfRelationships: – BibEntity: Dates: – D: 02 M: 06 Text: Jun2025 Supplement 1 Type: published Y: 2025 Identifiers: – Type: issn-print Value: 0097966X Numbering: – Type: volume Value: 56 Titles: – TitleFull: SID Symposium Digest of Technical Papers Type: main |
| ResultId | 1 |