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Characteristics of inductively coupled plasma radio frequency ion sources in commercial ion implanters.

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Title: Characteristics of inductively coupled plasma radio frequency ion sources in commercial ion implanters.
Authors: Hwang, Jong Jin1, Sim, Hyo Jun1, Moon, Seung Jae1, smoon@hanyang.ac.kr
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jul2025, Vol. 43 Issue 4, p1-8, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186913325
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Characteristics of inductively coupled plasma radio frequency ion sources in commercial ion implanters.
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  Data: <searchLink fieldCode="AU" term="%22Hwang%2C+Jong+Jin%22">Hwang, Jong Jin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Sim%2C+Hyo+Jun%22">Sim, Hyo Jun</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Moon%2C+Seung+Jae%22">Moon, Seung Jae</searchLink><relatesTo>1</relatesTo>, <i>smoon@hanyang.ac.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; Jul2025, Vol. 43 Issue 4, p1-8, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=186913325
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/6.0004560
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 1
    Titles:
      – TitleFull: Characteristics of inductively coupled plasma radio frequency ion sources in commercial ion implanters.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Hwang, Jong Jin
      – PersonEntity:
          Name:
            NameFull: Sim, Hyo Jun
      – PersonEntity:
          Name:
            NameFull: Moon, Seung Jae
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          Dates:
            – D: 01
              M: 07
              Text: Jul2025
              Type: published
              Y: 2025
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              Value: 43
            – Type: issue
              Value: 4
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
              Type: main
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