Mechanisms of sodium hydroxide (NaOH)-catalyzed sealing of SiO2/SiO2 direct bonding interfaces.
Saved in:
| Title: | Mechanisms of sodium hydroxide (NaOH)-catalyzed sealing of SiO2/SiO2 direct bonding interfaces. |
|---|---|
| Authors: | Noel, P.1, paul.noel@cea.fr, Rieutord, F.2, Larrey, V.1, Tardif, S.3, Morales, C.1, Hijazi, H.1, Thoréton, V.1, Papon, A.-M.1, Saghi, Z.1, Landru, D.2, Fournel, F.1 |
| Source: | Journal of Applied Physics; 8/7/2025, Vol. 138 Issue 5, p1-10, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
|---|---|
| DOI: | 10.1063/5.0277335 |
