Wafer-scale technology for the integration of molybdenum disulfide into vertical electronic device structures.

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Bibliographic Details
Title: Wafer-scale technology for the integration of molybdenum disulfide into vertical electronic device structures.
Authors: Linkenheil, Anna1,2,3, anli@tf.uni-kiel.de, Scheler, Theresa3,4, Hähnlein, Bernd2,3,5, Schneegaß, Jonas2,3, Gronenberg, Ole6, Knauer, Andrea3, Schaaf, Peter3,4, Kienle, Lorenz6, Ziegler, Martin1, mzi@tf.uni-kiel.de
Source: Journal of Materials Science; Aug2025, Vol. 60 Issue 30, p12844-12858, 15p
Database: Applied Science & Technology Source
Description
ISSN:00222461
DOI:10.1007/s10853-025-11228-3