70‐1:Invited Paper: Challenges of Atomic‐Layer‐Deposited Oxide Semiconductor Channels beyond PVD: Material, Devices, and M3D Stacked Structures.
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| Title: | 70‐1:Invited Paper: Challenges of Atomic‐Layer‐Deposited Oxide Semiconductor Channels beyond PVD: Material, Devices, and M3D Stacked Structures. |
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| Authors: | Kim, Yoon-Seo1, Choi, Su-Hwan2, Oh, Hyejin1, Hwang, Taewon1, Park, Jin-Seong1,2 |
| Source: | SID Symposium Digest of Technical Papers; Jun2025, Vol. 56 Issue 1, p946-949, 4p |
| Database: | Applied Science & Technology Source |
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