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A Study of HiPIMS Process Characteristics in SiO 2 Deposition.

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Title: A Study of HiPIMS Process Characteristics in SiO 2 Deposition.
Authors: Gajdics, Marcell1,2, gajdics.marcell@ek.hun-ren.hu, Olasz, Dániel1,2, Sáfrán, György1, Serényi, Miklós1
Source: Coatings (2079-6412); Sep2025, Vol. 15 Issue 9, p1023, 13p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings15091023