Dependence of optoelectronic properties of IGZO thin films deposited by RF magnetron sputtering on initial vacuum pressure.
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| Title: | Dependence of optoelectronic properties of IGZO thin films deposited by RF magnetron sputtering on initial vacuum pressure. |
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| Authors: | Yuan, Shuai1, Zhang, Wei1, Yang, Shumin1, shumin6666@126.com |
| Source: | Journal of Materials Science: Materials in Electronics; Sep2025, Vol. 36 Issue 27, p1-12, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-025-15780-1 |
