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Dependence of optoelectronic properties of IGZO thin films deposited by RF magnetron sputtering on initial vacuum pressure.

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Title: Dependence of optoelectronic properties of IGZO thin films deposited by RF magnetron sputtering on initial vacuum pressure.
Authors: Yuan, Shuai1, Zhang, Wei1, Yang, Shumin1, shumin6666@126.com
Source: Journal of Materials Science: Materials in Electronics; Sep2025, Vol. 36 Issue 27, p1-12, 12p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 188612431
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Dependence of optoelectronic properties of IGZO thin films deposited by RF magnetron sputtering on initial vacuum pressure.
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  Data: <searchLink fieldCode="AU" term="%22Yuan%2C+Shuai%22">Yuan, Shuai</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Wei%22">Zhang, Wei</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Yang%2C+Shumin%22">Yang, Shumin</searchLink><relatesTo>1</relatesTo>, <i>shumin6666@126.com</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Sep2025, Vol. 36 Issue 27, p1-12, 12p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=188612431
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s10854-025-15780-1
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 12
        StartPage: 1
    Titles:
      – TitleFull: Dependence of optoelectronic properties of IGZO thin films deposited by RF magnetron sputtering on initial vacuum pressure.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Yuan, Shuai
      – PersonEntity:
          Name:
            NameFull: Zhang, Wei
      – PersonEntity:
          Name:
            NameFull: Yang, Shumin
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          Dates:
            – D: 21
              M: 09
              Text: Sep2025
              Type: published
              Y: 2025
          Identifiers:
            – Type: issn-print
              Value: 09574522
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              Value: 36
            – Type: issue
              Value: 27
          Titles:
            – TitleFull: Journal of Materials Science: Materials in Electronics
              Type: main
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