Xenon ion sputtering-induced oxygen vacancy evolution and dielectric insulation degradation in alumina ceramics.
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| Title: | Xenon ion sputtering-induced oxygen vacancy evolution and dielectric insulation degradation in alumina ceramics. |
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| Authors: | Zhou, Sheng1, Liu, Hao-Yan1, Qi, Chang-Chun1, Liu, Yue-Lin1, Li, Wen-Rui1, Li, Hua-Peng1, Liu, Yue-Tong1, Zhang, Guan-Jun1, gjzhang@xjtu.edu.cn |
| Source: | Journal of Applied Physics; 10/14/2025, Vol. 138 Issue 14, p1-9, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0288220 |
