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Xenon ion sputtering-induced oxygen vacancy evolution and dielectric insulation degradation in alumina ceramics.

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Bibliographic Details
Title: Xenon ion sputtering-induced oxygen vacancy evolution and dielectric insulation degradation in alumina ceramics.
Authors: Zhou, Sheng1, Liu, Hao-Yan1, Qi, Chang-Chun1, Liu, Yue-Lin1, Li, Wen-Rui1, Li, Hua-Peng1, Liu, Yue-Tong1, Zhang, Guan-Jun1, gjzhang@xjtu.edu.cn
Source: Journal of Applied Physics; 10/14/2025, Vol. 138 Issue 14, p1-9, 9p
Database: Applied Science & Technology Source
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