Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.
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| Title: | Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging. |
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| Authors: | Pan, Aixi1, Zhu, Xiaoli1, Zhu, Chenxu1, Yin, Jian1, Hasan, Md Soyaeb1, Liu, Zhongyi2, Ban, Dayan1, dban@uwaterloo.ca, Cui, Bo1,3, bcui@uwaterloo.ca |
| Source: | Microsystems & Nanoengineering; 10/21/2025, p1-9, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 20961030 |
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| DOI: | 10.1038/s41378-025-00986-4 |
