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Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.

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Title: Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.
Authors: Pan, Aixi1, Zhu, Xiaoli1, Zhu, Chenxu1, Yin, Jian1, Hasan, Md Soyaeb1, Liu, Zhongyi2, Ban, Dayan1, dban@uwaterloo.ca, Cui, Bo1,3, bcui@uwaterloo.ca
Source: Microsystems & Nanoengineering; 10/21/2025, p1-9, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 188761029
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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      – Type: doi
        Value: 10.1038/s41378-025-00986-4
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      – Code: eng
        Text: English
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        PageCount: 9
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      – TitleFull: Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.
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            NameFull: Pan, Aixi
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            NameFull: Zhu, Xiaoli
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            NameFull: Zhu, Chenxu
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            NameFull: Yin, Jian
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              M: 10
              Text: 10/21/2025
              Type: published
              Y: 2025
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