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Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.

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Bibliographic Details
Title: Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.
Authors: Pan, Aixi1, Zhu, Xiaoli1, Zhu, Chenxu1, Yin, Jian1, Hasan, Md Soyaeb1, Liu, Zhongyi2, Ban, Dayan1, dban@uwaterloo.ca, Cui, Bo1,3, bcui@uwaterloo.ca
Source: Microsystems & Nanoengineering; 10/21/2025, p1-9, 9p
Database: Applied Science & Technology Source
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