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Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits.

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Bibliographic Details
Title: Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits.
Authors: Nabavi, Seyedfakhreddin1, snabavi@mun.ca, Ménard, Michaël1, Nabki, Frederic1
Source: Journal of Sensor & Actuator Networks; Oct2025, Vol. 14 Issue 5, p88, 15p
Database: Applied Science & Technology Source
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ISSN:22242708
DOI:10.3390/jsan14050088