Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits.

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Title: Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits.
Authors: Nabavi, Seyedfakhreddin1, snabavi@mun.ca, Ménard, Michaël1, Nabki, Frederic1
Source: Journal of Sensor & Actuator Networks; Oct2025, Vol. 14 Issue 5, p88, 15p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 189028924
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PubType: Academic Journal
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  Data: Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Sensor+%26+Actuator+Networks%22">Journal of Sensor & Actuator Networks</searchLink>; Oct2025, Vol. 14 Issue 5, p88, 15p
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      – Type: doi
        Value: 10.3390/jsan14050088
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      – Code: eng
        Text: English
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        PageCount: 15
        StartPage: 88
    Titles:
      – TitleFull: Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits.
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            NameFull: Nabavi, Seyedfakhreddin
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            NameFull: Ménard, Michaël
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            NameFull: Nabki, Frederic
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            – D: 01
              M: 10
              Text: Oct2025
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              Y: 2025
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