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III-Nitride MEMS drum resonators on flexible metal substrates.

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Bibliographic Details
Title: III-Nitride MEMS drum resonators on flexible metal substrates.
Authors: Kassem, A.1, Gujrati, R.1, Bourrier, D.2, Ayela, C.3, Mathieu, F.2, Dufour, I.3, Nicu, L.2, Ottapilakkal, V.1, Vuong, P.1,4, Sundaram, S.1,4, Hunt, W.5, Ougazzaden, A.1,4, Leichlé, T.1,2,5, thierry.leichle@cnrs.fr, Salvestrini, J. P.1,4,5, Jean-Paul.Salvestrini@georgiatech-metz.fr
Source: Microsystems & Nanoengineering; 10/24/2025, Vol. 11 Issue 1, p1-13, 13p
Database: Applied Science & Technology Source
Description
ISSN:20961030
DOI:10.1038/s41378-025-00995-3