Growing and polishing methods aiming at CVD diamond wafer over 10-inch.
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| Title: | Growing and polishing methods aiming at CVD diamond wafer over 10-inch. |
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| Authors: | Zhang, Haochen1, Yan, Zengyu1, Zhang, Hanxu1, Chen, Guangchao1, gcchen@ucas.ac.cn |
| Source: | Functional Diamond; Dec2025, Vol. 5 Issue 1, p1-12, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 26941112 |
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| DOI: | 10.1080/26941112.2025.2523762 |