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Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties.

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Bibliographic Details
Title:	Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties.
Authors:	Kengesbekov, Aidar^1,2,3, Rakhadilov, Bauyrzhan^1,2,3, Kussainov, Arystanbek^1,3, Serikbaikyzy, Ainur¹, ainura.serikbaikyzy@gmail.com, Askhatov, Arnur^1,2, Aringozhina, Zarina^1,3
Source:	Coatings (2079-6412); Dec2025, Vol. 15 Issue 12, p1434, 12p
Database:	Applied Science & Technology Source
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ISSN:	20796412
DOI:	10.3390/coatings15121434