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Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties.

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Title: Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties.
Authors: Kengesbekov, Aidar1,2,3, Rakhadilov, Bauyrzhan1,2,3, Kussainov, Arystanbek1,3, Serikbaikyzy, Ainur1, ainura.serikbaikyzy@gmail.com, Askhatov, Arnur1,2, Aringozhina, Zarina1,3
Source: Coatings (2079-6412); Dec2025, Vol. 15 Issue 12, p1434, 12p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 190529242
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties.
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  Data: <searchLink fieldCode="JN" term="%22Coatings+%282079-6412%29%22">Coatings (2079-6412)</searchLink>; Dec2025, Vol. 15 Issue 12, p1434, 12p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=190529242
RecordInfo BibRecord:
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        Value: 10.3390/coatings15121434
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      – Code: eng
        Text: English
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        StartPage: 1434
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      – TitleFull: Formation of Titanium Oxynitride Films by Reactive Magnetron Sputtering, Their Structural Features and Properties.
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            NameFull: Kengesbekov, Aidar
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            NameFull: Rakhadilov, Bauyrzhan
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            NameFull: Askhatov, Arnur
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            – D: 01
              M: 12
              Text: Dec2025
              Type: published
              Y: 2025
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