View in EDS HTML Full Text PDF Full Text

Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy.

Saved in:

Bibliographic Details
Title:	Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy.
Authors:	Yuan, Xiaolu^1,2, Bai, Xueyang^2,3, Huang, Ke^2,3, Wei, Junjun^1,2, Chen, Liangxian², Liu, Jinlong^2,3, Li, Chengming², Wang, Wenrui¹
Source:	Coatings (2079-6412); Dec2025, Vol. 15 Issue 12, p1481, 9p
Database:	Applied Science & Technology Source
Full text is not displayed to guests. Login for full access.

Description
ISSN:	20796412
DOI:	10.3390/coatings15121481