Verification of Microprobe Calibration Based on Actual Diameter Measurement of the Probe Tip Sphere.
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| Title: | Verification of Microprobe Calibration Based on Actual Diameter Measurement of the Probe Tip Sphere. |
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| Authors: | Ito, So1, so.ito@pu-toyama.ac.jp, Inukai, Daichi1, Tomioka, Takehiro1, Sugisawa, Yasutomo1, Matsumoto, Kenta1, Kamiya, Kazuhide1 |
| Source: | Metrology; Dec2025, Vol. 5 Issue 4, p73, 21p |
| Database: | Applied Science & Technology Source |
| ISSN: | 26738244 |
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| DOI: | 10.3390/metrology5040073 |
