LTP-corrected stitching interferometer achieving sub-nanometer accuracy for x-ray mirror metrology.
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| Title: | LTP-corrected stitching interferometer achieving sub-nanometer accuracy for x-ray mirror metrology. |
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| Authors: | Wang, Yanghui1, Zhao, Shuai1, shuai.zhao@ustc.edu.cn, Wang, Huiyun2, Hu, Yiyang1, He, Liang1, Fu, Shuo1, Liu, Zhengkun1, Du, Xuewei1, shuai.zhao@ustc.edu.cn, Wang, Qiuping1 |
| Source: | Review of Scientific Instruments; Dec2025, Vol. 96 Issue 12, p1-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0293552 |
