Increasing bushing temperature via a heating tube for performance enhancement of ion implanters.
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| Title: | Increasing bushing temperature via a heating tube for performance enhancement of ion implanters. |
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| Authors: | Shin, Yoon Hoo1, Sim, Hyo Jun1, Hwang, Jong Jin1,2, Moon, Seung Jae1, smoon@hanyang.ac.kr |
| Source: | International Journal of Heat & Fluid Flow; Mar2026, Vol. 118, pN.PAG-N.PAG, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0142727X |
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| DOI: | 10.1016/j.ijheatfluidflow.2025.110214 |
