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Increasing bushing temperature via a heating tube for performance enhancement of ion implanters.

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Title: Increasing bushing temperature via a heating tube for performance enhancement of ion implanters.
Authors: Shin, Yoon Hoo1, Sim, Hyo Jun1, Hwang, Jong Jin1,2, Moon, Seung Jae1, smoon@hanyang.ac.kr
Source: International Journal of Heat & Fluid Flow; Mar2026, Vol. 118, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 190716220
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Increasing bushing temperature via a heating tube for performance enhancement of ion implanters.
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  Data: <searchLink fieldCode="AU" term="%22Shin%2C+Yoon+Hoo%22">Shin, Yoon Hoo</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Sim%2C+Hyo+Jun%22">Sim, Hyo Jun</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Hwang%2C+Jong+Jin%22">Hwang, Jong Jin</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Moon%2C+Seung+Jae%22">Moon, Seung Jae</searchLink><relatesTo>1</relatesTo>, <i>smoon@hanyang.ac.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Heat+%26+Fluid+Flow%22">International Journal of Heat & Fluid Flow</searchLink>; Mar2026, Vol. 118, pN.PAG-N.PAG, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=190716220
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.ijheatfluidflow.2025.110214
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Titles:
      – TitleFull: Increasing bushing temperature via a heating tube for performance enhancement of ion implanters.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Shin, Yoon Hoo
      – PersonEntity:
          Name:
            NameFull: Sim, Hyo Jun
      – PersonEntity:
          Name:
            NameFull: Hwang, Jong Jin
      – PersonEntity:
          Name:
            NameFull: Moon, Seung Jae
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          Dates:
            – D: 01
              M: 03
              Text: Mar2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 0142727X
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            – Type: volume
              Value: 118
          Titles:
            – TitleFull: International Journal of Heat & Fluid Flow
              Type: main
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