Bibliographic Details
| Title: |
Phase Transformation and Water Adsorption Behavior of As‐Deposited and Annealed Ru Metal Thin Films Prepared by Atomic Layer Deposition. |
| Authors: |
Nalawade, Swapnil1, Kim, R. Soyoung2, Mahl, Johannes2, Cherono, Sheilah3, Chris‐Okoro, Ikenna3, Craciun, Valentin4,5, Yano, Junko6, Crumlin, Ethan2,7, Kumar, Dhananjay3, Aravamudhan, Shyam1, saravamu@ncat.edu |
| Source: |
Advanced Materials Interfaces; 1/7/2026, Vol. 13 Issue 1, p1-14, 14p |
| Database: |
Applied Science & Technology Source |
