Zero-method scanning-probe profilometer for steeply curved aspheric x-ray mirrors.
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| Title: | Zero-method scanning-probe profilometer for steeply curved aspheric x-ray mirrors. |
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| Authors: | Yumoto, Hirokatsu1,2, yumoto@spring8.or.jp, Koyama, Takahisa1,2, Ohashi, Haruhiko1,2 |
| Source: | Review of Scientific Instruments; Jan2026, Vol. 97 Issue 1, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/5.0299860 |
