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Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing.

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Bibliographic Details
Title: Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing.
Authors: Behrendt, Sebastian1, sebastian.behrendt@kit.edu, Altenmüller, Thomas2, thomas.altenmueller@infineon.com, May, Marvin Carl1, marvin.may@kit.edu, Kuhnle, Andreas1, andreas.kuhnle@kit.edu, Lanza, Gisela1, gisela.lanza@kit.edu
Source: Journal of Intelligent Manufacturing; Feb2026, Vol. 37 Issue 2, p829-848, 20p
Database: Applied Science & Technology Source
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ISSN:09565515
DOI:10.1007/s10845-025-02572-x