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Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing.

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Title: Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing.
Authors: Behrendt, Sebastian1, sebastian.behrendt@kit.edu, Altenmüller, Thomas2, thomas.altenmueller@infineon.com, May, Marvin Carl1, marvin.may@kit.edu, Kuhnle, Andreas1, andreas.kuhnle@kit.edu, Lanza, Gisela1, gisela.lanza@kit.edu
Source: Journal of Intelligent Manufacturing; Feb2026, Vol. 37 Issue 2, p829-848, 20p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 191453185
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PubType: Academic Journal
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  Data: Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing.
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  Data: <searchLink fieldCode="AU" term="%22Behrendt%2C+Sebastian%22">Behrendt, Sebastian</searchLink><relatesTo>1</relatesTo>, <i>sebastian.behrendt@kit.edu</i><br /><searchLink fieldCode="AU" term="%22Altenmüller%2C+Thomas%22">Altenmüller, Thomas</searchLink><relatesTo>2</relatesTo>, <i>thomas.altenmueller@infineon.com</i><br /><searchLink fieldCode="AU" term="%22May%2C+Marvin+Carl%22">May, Marvin Carl</searchLink><relatesTo>1</relatesTo>, <i>marvin.may@kit.edu</i><br /><searchLink fieldCode="AU" term="%22Kuhnle%2C+Andreas%22">Kuhnle, Andreas</searchLink><relatesTo>1</relatesTo>, <i>andreas.kuhnle@kit.edu</i><br /><searchLink fieldCode="AU" term="%22Lanza%2C+Gisela%22">Lanza, Gisela</searchLink><relatesTo>1</relatesTo>, <i>gisela.lanza@kit.edu</i>
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=191453185
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        Value: 10.1007/s10845-025-02572-x
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        Text: English
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              Text: Feb2026
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              Y: 2026
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